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发明名称
THIN FILM FORMATION
摘要
申请公布号
JPH01301859(A)
申请公布日期
1989.12.06
申请号
JP19880130206
申请日期
1988.05.30
申请人
FUJI PHOTO FILM CO LTD
发明人
NAKADA JUNJI;TAKEUCHI HIDEAKI
分类号
C23C14/36;C23C14/35
主分类号
C23C14/36
代理机构
代理人
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地址
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