PLASMA CVD APPARATUS,申请号JP19880126767-传众专利搜索

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发明名称	PLASMA CVD APPARATUS
摘要
申请公布号	JPH01295414(A)	申请公布日期	1989.11.29
申请号	JP19880126767	申请日期	1988.05.24
申请人	NEC CORP	发明人	SAKURAI TAKASHI
分类号	C30B25/02;C23C16/50;H01L21/205;H01L21/31	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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