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发明名称
SEMICONDUCTOR AND MANUFACTURE THEREOF
摘要
申请公布号
JPH01274454(A)
申请公布日期
1989.11.02
申请号
JP19880103591
申请日期
1988.04.26
申请人
SEIKO EPSON CORP
发明人
IWAMATSU SEIICHI
分类号
H01L23/522;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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