| 摘要 |
Pre-ionization is important for the production of a uniform glow discharge in the gas cavity of the laser chamber (LK) between the laser electrodes (E1, E2). For the X-ray pre-ionization used in particular in partial-discharge excimer lasers, high-voltage pulses are required. According to the invention, these are obtained by means of an auxiliary circuit, consisting of a branch (Z1) connected in parallel with the high-voltage switch (S) or with the laser discharge section (E1, E2) and having a switch element in the form of a saturable magnetic inductor (Ls) connected in series with the primary winding (w1) of a high-voltage pulse transformer (Tr). The high-voltage ignition pulses for the pre-ionizing element, in particular an X-ray tube (RR), are generated at the secondary winding (w2) of said transformer. The branch has a series capacitance (C3) if connected in parallel with the high-voltage switch (S) and a parallel capacitance if connected in parallel with the laser discharge section (E1, E2). With the new circuit, the time of the pre-ionization pulses, in particular the X-ray pulses, can be finely adjusted in relation to the voltage increase time across the laser electrodes and can be tuned to the laser. |
