CONTROL SYSTEM OF LIQUID METAL ION SOURCE,申请号JP19880103415-传众专利搜索

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发明名称	CONTROL SYSTEM OF LIQUID METAL ION SOURCE
摘要
申请公布号	JPH01274346(A)	申请公布日期	1989.11.02
申请号	JP19880103415	申请日期	1988.04.26
申请人	SEIKO INSTR INC	发明人	MORIYA NAOTO
分类号	H01J27/26;H01J37/08;H01J37/248	主分类号	H01J27/26
代理机构		代理人
主权项
地址

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