| 摘要 |
PURPOSE:To obtain a high-sensitivity microscope which can detect even a very weak signal such as a reflecting signal from an internal flaw by allowing the microscope to excite leakage surface acoustic waves on the surface of a sample and receive leakage radiation waves of a prescribed radiation angle. CONSTITUTION:A sample surface is arranged in matching with the XY plane, a converging ultrasonic transducer 16 for transmission which excites leakage surface acoustic waves on the surface of the sample is arranged so that its central axis is contained in XZ plane. In addition, a linearly converging ultrasonic transducer 19 for reception is arranged so that its converging direction is matched with X direction and its main body is inclined against the surface of the sample at a prescribed angle in the plane (XZ plane) orthogonal to the converging direction and the beam spot 21 of the transducer 16 can be contained on the intersecting line 20 of the plane orthogonal to the focusing direction of the transducer 19 and surface of the sample. Therefore, detectable leakage surface acoustic waves components are increased while leaving characteristics that only leakage radiation waves of a prescribed radiation angle can be detected selectively and the dynamic range becomes larger. Thus the sensitivity of the microscope can be improved. |
