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发明名称
摘要
申请公布号
JPH0145234(B2)
申请公布日期
1989.10.03
申请号
JP19850091937
申请日期
1985.04.26
申请人
FUJITSU LTD
发明人
OKUDA SHINYA
分类号
H01L21/208;H01S5/00
主分类号
H01L21/208
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