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发明名称
ANODE PLATE FOR A PARALLEL-PLATE REACTIVE ION ETCHING REACTOR
摘要
申请公布号
EP0266604(A3)
申请公布日期
1989.09.13
申请号
EP19870115184
申请日期
1987.10.16
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
GUT, GEORGE MARK;MONAHAN, STEVEN EDWARD
分类号
H01L21/302;C23F4/00;H01J37/32;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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