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发明名称
INTEGRATED CIRCUIT PROBE PARALLELISM ESTABLISHING METHOD AND APPARATUS
摘要
申请公布号
EP0260024(A3)
申请公布日期
1989.09.13
申请号
EP19870307558
申请日期
1987.08.26
申请人
TEKTRONIX, INC.
发明人
VEENENDAAL, CORNELIS T.
分类号
G01R1/06;G01B7/14;G01B7/31;G01R1/073;G01R31/28;G05B19/402;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R1/06
代理机构
代理人
主权项
地址
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