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发明名称
METHOD FOR MEASURING SECTIONAL SHAPE OF PERIODIC GROOVE
摘要
申请公布号
JPH01219504(A)
申请公布日期
1989.09.01
申请号
JP19880045286
申请日期
1988.02.27
申请人
SHIMADZU CORP
发明人
NAMIOKA TAKESHI;KOIKE MASAHITO
分类号
G01B11/24
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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