发明名称 ADJUSTMENT MECHANISM OF FINE MOVEMENT
摘要 PURPOSE:To simplify operation and reduce fluctuation in accuracy by fixing an adjustment screw for upper and lower fine movement and a fastening screw while the two are overlapped. CONSTITUTION:A part of the head 5a of an adjustment screw 5 is overlapped with a part of the head 4a of a fixing screw 4 in a direction of adjustment. This significantly decreases the distance between the points of application of both screws 4, 5, to prevent bending moment from occurring easily, so that operation is simplified and parallelism can be maintained for a long time.
申请公布号 JPH01216107(A) 申请公布日期 1989.08.30
申请号 JP19880040631 申请日期 1988.02.25
申请人 TOSHIBA CORP 发明人 KOYAMA FUSAYUKI
分类号 F16B5/02;H01L21/68;H01L21/683 主分类号 F16B5/02
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