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发明名称
EPITAXIAL GROWTH PROCESS
摘要
申请公布号
JPH01211913(A)
申请公布日期
1989.08.25
申请号
JP19880035112
申请日期
1988.02.19
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
OMACHI TOKURO;KOHAMA TAKETAKA;KADOTA YOSHIAKI;FUKUDA YUKIO;WATANABE YOSHIO;OKAMOTO HIROSHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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