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发明名称
IMPURITY DIFFUSION
摘要
申请公布号
JPH01170020(A)
申请公布日期
1989.07.05
申请号
JP19870328788
申请日期
1987.12.25
申请人
MITSUBISHI METAL CORP;JAPAN SILICON CO LTD
发明人
IWAMOTO KOICHI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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