| 摘要 |
<p>PURPOSE: To form a monolithic thin film electronic matrix circuit having a large area by computer controlled automatic operation to expose new meshes to plural vacuum evaporation materials or the like by successively pressing these against a single mesh of a large glass pane by mutually and accurately positioning small evaporation masks. CONSTITUTION: A glass pane 1 moves in the X and Y direction so that meshes of its new surface can be placed on an evaporation chimney 2 and a selected mask 3. A raising-lowering stage 15 contacts the selected mask 3 having a frame 2 from below, and is raised up to contact the lower side of the glass pane 1 through an opening part of a firmly installed INVAR plate 11 from a housing opening part of a circular conveyor 14. At this time, a ball pin 12 of an upper surface of the mask frame 2 slidingly enters two funnel sockets 13 of diagonal corner parts of the INVAR plate 11 for accurate positioning. For example, selection of crucibles to house specific materials of electron beam heated plural evaporation sources 16 having six circibles and a parameter necessary for respective films to be vacuum-evaporated on selected meshes of the glass pane 1, are stored in a computer, and are imparted by its computer.</p> |
