PRESSURE HEAT TREATING EQUIPMENT,申请号JP19870311199-传众专利搜索

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发明名称	PRESSURE HEAT TREATING EQUIPMENT
摘要
申请公布号	JPH01152630(A)	申请公布日期	1989.06.15
申请号	JP19870311199	申请日期	1987.12.09
申请人	TEL SAGAMI LTD	发明人	KOBAYASHI JUNICHI;KOGA HIDENORI
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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