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经营范围
发明名称
LICHTEMPFINDLICHE HARZMASSE
摘要
申请公布号
DE3839714(A1)
申请公布日期
1989.06.08
申请号
DE19883839714
申请日期
1988.11.24
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP
发明人
USHIROGOUCHI, TORU, YOKOHAMA, JP;HAYASE, SHUJI, KAWASAKI, JP;ONISHI, YASUNOBU;HORIGUCHI, RUMIKO, YOKOHAMA, JP
分类号
G03F7/021;G03F7/023;H01L21/027;H01L21/30
主分类号
G03F7/021
代理机构
代理人
主权项
地址
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