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发明名称
MANUFACTURE OF SIO2 FILM
摘要
申请公布号
JPH01145820(A)
申请公布日期
1989.06.07
申请号
JP19870305475
申请日期
1987.12.01
申请人
SEIKO INSTR & ELECTRON LTD
发明人
KATO YUICHI
分类号
H01L29/78;H01L21/283;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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