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发明名称
MANUFACTURE OF PROBE CARD
摘要
申请公布号
JPH01145578(A)
申请公布日期
1989.06.07
申请号
JP19870303820
申请日期
1987.12.01
申请人
TOKYO ELECTRON LTD
发明人
MASUOKA NOBORU
分类号
G01R1/073;H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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