| 摘要 |
<p>PURPOSE:To reduce the occupational area in an accommodated objects transferring/storing device of a semiconductor manufacturing facility by arranging a running drive part for a transfer device, which moves in front of and, below the fixed rack. CONSTITUTION:A running drive part 40 of a transfer device 31 is furnished below a fixed rack 30 with possibility of moving along the floor, and a stay 41 is installed in front of the driver part 40. An elevator unit 42 and a rise/fall drive part 43 are furnished on this stay 41. In this constitution, the stay 41 is moved horizontally by the running drive part 40, and the elevator unit 42 is raised and lowered by the elevator drive part 43, and a hand unit 44 is controlled to perform transfer. This constitution makes the occupied area small.</p> |
