ELECTRON BEAM LITHOGRAPHY METHOD,申请号JP19870294114-传众专利搜索

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发明名称	ELECTRON BEAM LITHOGRAPHY METHOD
摘要
申请公布号	JPH01136332(A)	申请公布日期	1989.05.29
申请号	JP19870294114	申请日期	1987.11.24
申请人	HITACHI LTD;HITACHI VLSI ENG CORP	发明人	MURAI FUMIO;YAMAMOTO TOSHIYUKI;OKAZAKI SHINJI
分类号	G03F9/00;H01L21/027;H01L21/30	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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