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发明名称
摘要
申请公布号
JPH0179826(U)
申请公布日期
1989.05.29
申请号
JP19870174691U
申请日期
1987.11.16
申请人
发明人
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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