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发明名称
DEVICE FOR VAPOR GROWTH OF CRYSTAL
摘要
申请公布号
JPH01130518(A)
申请公布日期
1989.05.23
申请号
JP19870289971
申请日期
1987.11.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
KONNO NOBUAKI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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