| 摘要 |
PURPOSE:To constitute a small-sized scanner by causing a sliding displacement for piezo-elements in two axes out of piezo-elements in three axes intersecting perpendicularly to one another, while causing a displacement in the thickness direction for one in the other axis. CONSTITUTION:A main body 11 of a scanner comprises X-axis and Y-axis elements 17 and 18 which are formed of piezo-elements PZTs bonded by a bonding agent, and a Z-axis element 16 which is insulated from these elements and formed of PZTs laminated in a layer and bonded, and a driving voltage is supplied thereto from a terminal board 12 by urethane-coated lead wires. The displacement of the thickness slide direction of the PZT is used for displacements in the directions Y and Z, while the displacement in the thickness direction thereof is used for a displacement in the direction X. A Z-axis element 16 is constructed to be of a lamination type by laminating four PZTs, so as to increase the amount of the displacement in the direction Z. |
