| 摘要 |
PROBLEM TO BE SOLVED: To heighten strength and lengthen the service life by forming a dense film on the surface of a partition. SOLUTION: Since a dense film 8 is formed on the surface of a partition 2, the mechanical strength of the partition 2 is high, voids on the surface of the partition 2 are embedded, and release of impurities is suppressed. As the material of the film 8, a mixture of 20 wt.% or more B2 O3 , 18 wt.% or more SiO2 , and 12 wt.% or more Al2 O3 is preferable. B2 O3 acts as glass fusing agent to increase denseness. SiO2 increases surface hardness. Al2 O3 prevents phase splitting of the glass and increases chemical resistance. By including 0.3-10% oxide such as CeO2 , TiO2 or ZnO in the glass forming the film 8, ultraviolet ray shielding action is added, and deterioration of the partition caused by ultraviolet ray can be reduced. The thickness of the film 8 is preferable to be >=3μm from the standpoint of mechanical strength, chemical resistance and the ultraviolet ray shielding action.
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