| 摘要 |
PURPOSE:To obtain a pattern excellent in accuracy by a method wherein an oxide powder containing a specified element at a required ratio is made to be mixed with a photosensitive material, which is made to be formed into a thin film and the photosensitive material is made to be set by irradiating it with electron rays or the like, and the film is made to be developed so as to remove a non-irradiated part and calcined. CONSTITUTION:An oxide powder containing Cu, and Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, or Lu, and Ba, and Ag at a required ratio except Ag is made to be mixed with a photosensitive material. The mixed material is made to form into a thin film, and a required part of it is made to be set by irradiating visible light rays, ultraviolet rays, X-rays, gamma-rays or electron rays onto it. Next, the thin film is developed to remove a non-irradiated part and calcined in an oxidizing atmosphere at a temperature of 700-1100 deg.C. By these processes, the thickness control and the patterning of the film can be easily achieved and the pattern excellent in accuracy can be obtained. |
