| 摘要 |
PURPOSE:To obtain an oxide superconductive thin film having small width of transition temp. of superconductivity with high reproducibility by forming >=one unit of deposited layer constituted of three deposited layers, in the order of Yb-Ba-Cu or Cu-Ba-Yb having specified atomic ratios among Ba, Yb and Cu on a substrate, then heat-treating in gaseous O2. CONSTITUTION:Each Yb, Ba, and Cu is charged to three independent hearth in an electron beam vapor deposition device. Each of said metal is deposited individually in the order of Yb-Ba-Cu or Cu-Ba-Yb so as to have 1:2:3 molar ratio of Yb:Ba:Cu forming one or plural units on a substrate consisting of single crystals of SrTiO3, MgO, etc. Then, the deposited layer(s) is(are) heat-treated in gaseous O2 at <= decomposition temp. of the oxides in said deposited layer(s). By this method, an oxide superconductive thin film having extremely small width DELTATc of transition temp. of superconductivity as small as 1/3 of that obtd. by the conventional methods is obtd. with high reproducibility.
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