发明名称 Semiconductor rod zone refining apparatus - using RF heating with work coil traversed along the rod
摘要 <p>RF induction work coil having a single turn is arranged to encircle a rod of semiconductor material which is to be zone refined and relative motion is produced between the rod and the coil to cause a molten zone in the rod, due to induction heating, to traverse the length of the rod. An RF power oscillator circuit includes a power amplifying device having a control electrode and a power output electrode which is connected through a voltage blocking capacitor to an input node of a direct coupled LC tank circuit. The tank circuit includes the work coil and a capacitor, one input side of the coil being connected to the input nodE, the capacitor connecting the other side of the coil to the input node, and the work coil having a grounded centre tap serving as a ground note of the dc tank circuit. Used for producing monocrystalline semiconductors of extremely high purity and crystalline lattice structure without dislocations. Circuits is more stable than prior circuits so that the treatment of the rod is stable and uniform and possibility of arcing is substantially reduced.</p>
申请公布号 IT1206390(B) 申请公布日期 1989.04.21
申请号 IT19770031245 申请日期 1977.12.23
申请人 MONSANTO CO. 发明人
分类号 C30B;(IPC1-7):C30B/ 主分类号 C30B
代理机构 代理人
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