| 摘要 |
PURPOSE:To prevent the distance between adjacent masks from being narrowed and the dielectric breakdown from occurring by forming magnetic poles with the same polarity face to face at least on part of opposing faces of the adjacent masks. CONSTITUTION:Two masks 11 and 12 are magnetized in the thickness direction so that the mating mask and the opposing face are made magnetic poles with the same polarity respectively, and the electrostatic suction force between the masks 11 and 12 generated when the preset potential is applied to the masks 11 and 12 is offset by the magnetic resilicncy of the same polarity. The mask distance is thereby prevented from being narrowed by the electrostatic suction force, and the fluctuation of the electrostatic lens formed between the masks and the dielectric breakdown can be prevented. |
