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发明名称
EXPOSURE
摘要
申请公布号
JPS6471124(A)
申请公布日期
1989.03.16
申请号
JP19870227841
申请日期
1987.09.11
申请人
TOSHIBA CORP
发明人
SEKIYA TOMOJI
分类号
H01L21/30;G03F7/20;H01L21/027;H01S3/101
主分类号
H01L21/30
代理机构
代理人
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