| 摘要 |
PURPOSE:To make microwave discharge plasma stable and spatially uniform, by sealing laser gas in a discharge space between a conductor wall formed in a part of a microwave circuit and dielectric facing said wall, forming a microwave mode having an electric component vertical to the boundary between the dielectric and plasma, and arranging the microwave circuit and a microwave transmission line in parallel along the direction of laser optical axis. CONSTITUTION:Microwave generated by a magnetron 3 travels a waveguide 4, and is coupled with a laser head 2 by a microwave coupling window 6. The laser head 2 and the waveguide 4 are arranged in parallel along the direction of the laser optical axis. Microwave is supplied via the microwave coupling window 6 of continuous length arranged in the longitudinal direction of the laser head part 2. As a result, intense microwave electromagnetic field can be uniformly generated on the whole part of the ridges 21, 22 of the laser head part 2. By this intense microwave electromagnetic field, laser gas sealed in a discharge space 26 is subjected to discharge breakdown. Thus, plasma is generated, and laser medium is excited. |
