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经营范围
发明名称
PROBING MACHINE
摘要
申请公布号
JPS6468939(A)
申请公布日期
1989.03.15
申请号
JP19870225187
申请日期
1987.09.10
申请人
CANON INC
发明人
SAKAI TERUMASA;MATSUMOTO KAZUMASA;MIWA YOSHINORI;OMORI TARO
分类号
H01L21/66;G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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