| 摘要 |
PURPOSE:To contrive an increase in the output of a laser beam by a method wherein a high-voltage lead for connecting to a cathode and low-voltage leads for connecting to an anode are respectively provided on a high-voltage side and a low-voltage side in parallel to each other and moreover, the directions of currents to be made to flow through these leads are each set in a direction reverse to each other. CONSTITUTION:A high-voltage lead 14 and a pair of branched lowvoltage leads 15 are introduced in a laser tube 1, whereby at least parts, which are positioned in the tube 1, of these leads 14 and 15 can be provided in parallel to each other and moreover, the directions of currents to be made to flow through these leads can be each set in a direction reverse to each other. Accordingly, as the lead 14 and the leads 15 are formed into a coaxial structure, the inductance of a circuit for main discharge is reduced significantly by that and peaking capacitors 11 can be charged with a current of a rapid rise pulse. Furthermore, as the two leads 15 are connected to both ends in the width direction of an anode 5 and the number of the leads to be connected to the anode is increased compared to the conventional way, wherein only one lead has been connected to the anode, the inductance of the circuit can be reduced by that as well. |
