发明名称 Topography sensor
摘要 An apparatus and methods for use in measuring the topography of a surface by contact which comprises a piezoelectric polymer film sensor, such as polyvinyldiene difluoride film, with a body portion and a tip portion, with electrically conductive films adhered to each principal surface of the sensor, and a non-conductive support restraining the sensor a fixed distance from the surface to be measured and with the sensor having an arcuate form when flexed by the surface.
申请公布号 US4811594(A) 申请公布日期 1989.03.14
申请号 US19880185385 申请日期 1988.04.25
申请人 BATTELLE MEMORIAL INSTITUTE 发明人 DVORSKY, JAMES E.
分类号 G01B7/34;(IPC1-7):G01B7/34 主分类号 G01B7/34
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