| 摘要 |
PURPOSE: To increase electric outputs which can be introduced into a discharge region of lateral turbulence laser without disturbing stability of discharges and increase light outputs by a method, wherein a plurality of radiation-type gas jets are used, and a discharge state is generated in their jets by an upstream electrode, disposed locally at the origin of their jets, etc. CONSTITUTION: This laser comprises optical means for oscillating or circulating beams, a discharge chamber 20, circulating means for circulating active gas, and electric means for generating an electric discharge state. A plurality of introduction passages 19 for introducing active gas into the discharge chamber 20 is used as an injection port 10 which occupies a small portion of an area of an upstream surface 22 of the discharge chamber 20, and gas injected from each injection port 10 forms a radiation type jet 40 except for one or more cuneiform spaces which are a portion of a discharge module 16, corresponding to the injection port 10, and an upstream cathode 8 is provided in each injection port 10, so that discharge is caused from the origin in the radiation-type jet 40 to the jet 40. Further, for example, a grid-like downstream electrode 12 in common, is provided so that an electric discharge 44 is diffused, ranging over the entire volume of the jet 40. |
