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发明名称
Planarization method
摘要
申请公布号
US4806504(A)
申请公布日期
1989.02.21
申请号
US19860906344
申请日期
1986.09.11
申请人
FAIRCHILD SEMICONDUCTOR CORPORATION
发明人
CLEEVES, JAMES M.
分类号
H01L21/302;H01L21/027;H01L21/3065;H01L21/3105;H01L21/312;H01L21/768;(IPC1-7):B05D5/12
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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