MANUFACTURE OF SILICON THIN FILM,申请号JP19870201463-传众专利搜索

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发明名称	MANUFACTURE OF SILICON THIN FILM
摘要
申请公布号	JPS6444014(A)	申请公布日期	1989.02.16
申请号	JP19870201463	申请日期	1987.08.12
申请人	SEIKO EPSON CORP	发明人	SHIMOBAYASHI TAKASHI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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