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发明名称
WET ETCHING DEVICE
摘要
申请公布号
JPS6432636(A)
申请公布日期
1989.02.02
申请号
JP19870187728
申请日期
1987.07.29
申请人
MATSUSHITA ELECTRON CORP
发明人
HAYASHI HIDETAKA;ASAHI KUNIHIKO
分类号
C23F1/08;H01L21/306
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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