SCHWINGUNGSWINKELGESCHWINDIGKEITSSENSOR

摘要

To increase the stability and sensitivity of a vibrational angular velocity sensor, the vibrator is airtightly housed within a glass vacuum casing whose inside surface is coated with a metallic film. Further, conductive lead pins electrically connected between vibrator signal terminals and a printed circuit board for a signal processing circuit and fixing pins mechanically fixed to the printed circuit board are arranged with a constant length outside the casing in parallel to each other. Further, two vibrator support pins are fixed to the glass casing by glass material. To obtain a high vacuum within the glass casing, a subcasing including a getter is connected to the casing through a connecting tube cut off or sealed after evacuation.