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发明名称
APPARATUS FOR PLASMA ASSISTED ETCHING
摘要
申请公布号
EP0220901(A3)
申请公布日期
1989.02.01
申请号
EP19860308106
申请日期
1986.10.20
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
DAVIS, CECIL J.;CARTER, DUANE E.;JUCHA, PHETT B.
分类号
H01L21/302;C23F1/00;H01J37/32;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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