| 摘要 |
PURPOSE:To fabricate ceramic superconductive thin film uniform and of high quality easily by affixing the group IIa and group IIIa elements or oxides onto a base board by CVD and PVD method, respectively. CONSTITUTION:The group IIIa elements and those of copper type easy to gasify are affixed to a base board by the CVD method, while the group IIa hard to gasify by the PVD method. To form a superconductive film of YBa2Cu3O7, for ex., Y and Cu are affixed to the base board by the CVD method of radical jet type, while B by the MBE method. Gaseous yttrium cyclopentadienyl (YC) is used as Y material, while gaseous copper acetylacetonate (CuA) as Cu material. BaO is used as Ba material. From a nozzle 2 a mixture gas of YC, CuA, O2 and N2 is sprayed to the base board 5 by opening a shutter 6 and closing shutter 7. Then the shutter 7 is opened to irradiate the BaO molecular beam in a crucible 3 to the base board 5. This is repeated to form a film, which undergoes then a heat treatment.
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