| 摘要 |
PURPOSE:To improve the adhesiveness of a lubricating film to the surface of a protective film by executing a stage for cleaning and activating the surface of the protective film by dry etching, then shifting the stage into a stage for depositing the lubricating film thereon in the state of isolating the protective film having the cleaned surface from the atm., thereby depositing and forming the lubricating film on the surface of the protective film. CONSTITUTION:The stage for cleaning and activating the surface of the protective film 13 formed on a magnetic film 12 of a disk substrate 11 by a dry etching method such as plasma etching or sputter etching is executed and thereafter, the stage for depositing the lubricating film 14 on the cleaned surface of the protective film 14 in the clean environmental state where the protective film 13 is isolated form the atm. is started to deposit and form the lubricating film 14 on the surface of the protective film 13. The adhesiveness of the formed lubricating film 14 to the protective film 13 is thereby greatly improved and the surface lubricity of the magnetic recording medium is improved and stabilized. The breakdown, etc., of the medium surface by a head crash are thus prevented. |
