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发明名称
SEMICONDUCTOR CHIP
摘要
申请公布号
JPS648639(A)
申请公布日期
1989.01.12
申请号
JP19870164761
申请日期
1987.06.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
TOUKAWA CHIKAHIRO
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
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