| 摘要 |
PURPOSE:To reduce the electrostatic charging of a sensor cover itself even when the cover is made of a nonconductor by forming a recessed part of >=0.2mm in depth nearby the detection hole of the sensor cover. CONSTITUTION:Plural recessed grooves 6 of >=0.2mm are formed in the lengthwise direction of the bottom surface 4 of the quadrangularly prismatic cover 1 of a sensor nearby the detection hole of the cover 1. Then a rotary sector 9 rotates through a shaft 11. Further, the sector 9 has two circular through-holes. In this state, an IC 30 to be detected passes below a detection electrode 8. Then if the main surface, etc., of the package 31 of the IC 30 is charged electrostatically, lines of electric force are generated between the IC 30 as the electrostatically charged body and detection electrode 8 by electrostatic inductance. The through hole, on the other hand, moves by the rotation of the sector 9, so the lines of electric force are transmitted intermittently. Consequently, an AC signal is obtained from the detection electrode 8 and this C signal is amplified and rectified 13 and becomes a DC voltage proportional to an electrostatic charging voltage, so accurate electrostatic detection is performed.
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