| 摘要 |
PURPOSE:To obtain a small-sized resonator with a very small capacitance ratio by adding a heavy metal interdigital transducer electrode to a prescribed rotation Y-cut LiNbO3 substrate surface and exciting and propagating a surface acoustic wave in a direction of the substrate. CONSTITUTION:The resonator is constituted by adding an IDT (heavy metal interdigital transducer) electrode to the surface of a rotation Y-cut LiNbO3 substrate and exciting and propagating a SAW (surface acoustic wave) in a direction X of the substrate. As the rotation Y-cut LiNbO3 substrate, the rotation Y-cut LiNbO3 substrate is used, whose rotation angle is selected in a way that the electromechanical coupling coefficient as to the Love wave stimulated in the substrate is large and that of the SAW stimulated at the same time is small. Moreover, as the IDT electrode, an electrode made of Au, Ag or Pt is used. Then the frequency-temperature characteristic is improved by coating SiO2 of a prescribed thickness onto the surface of the substrate.
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