发明名称 GAS LASER SYSTEM
摘要 PURPOSE:To eliminate the need for evacuation of a gas inside a container even during the exchange of an optical window by a method wherein an opening and shutting window and an evacuation port are installed at the outside of the laser container and a cylindrical optical-element mounting tube is attached in such a way that this tube is pierced through a wall face of the laser container. CONSTITUTION:Cylindrical optical-window mounting tubes 3 are installed in such a way that they surround a laser beam axis 1; optical windows 4 are installed at both external ends of the optical-window mounting tubes 3 at the laser container 2 in such a way that the laser container 2 can become airtight. Furthermore, shutters 6 are installed at opening and shutting windows 5 facing the incide of the laser container 2 at the optical-window mounting tubes 3 in such a way that the shutters are detachable and that they can keep the optical-window mounting tubes 3 and the laser container 2 airtight; furthermore, gas inlet and exhaust ports 7 are installed at the optical-window mounting tubes 3 in such a way that they can evacuate the space at the optical-window mounting tubes 3 formed by their inner walls, optical windows 4 and shutters 6 and can introduce a laser gas.
申请公布号 JPS63257284(A) 申请公布日期 1988.10.25
申请号 JP19870092258 申请日期 1987.04.14
申请人 NEC CORP 发明人 HOTTA KAZUAKI;ARAI MOTOHIRO
分类号 H01S3/034;H01S3/10 主分类号 H01S3/034
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