| 摘要 |
PURPOSE:To make an anode electrode hard to be stuck with a plasma product by selecting the material of the anode electrode to the material generating a product easy to be gasified by the reaction with the plasma gas component. CONSTITUTION:A material evaporated from the surface of an anode electrode 7 by the high vapor pressure of a product generated by the reaction between the plasma gas component and the material component of the anode electrode 7 is used as the material of the anode electrode 7. For example, MoF6 is generated in such a reaction configuration as 3CF4+2Mo 3C+2MoF6, this product constitutes an anode electrode with the very high vapor pressure (easy to evaporate). Accordingly, it is evaporated and removed by the radiation heat from a filament, and the cleaning or the like is not required.
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