<p>An apparatus for generating plasma by making use of electron cyclotron resonance employs permanent magnets (65) for forming magnetic fields, and the permanent magnets are arranged in such a manner as to form stronger magnetic fields in peripheral portion of a plasma chamber (51) than in a central portion of the same. Furthermore, electrons are introduced into an additional plasma chamber (52) in which an electric field is not applied so as to generate low-temperature plasma.</p>
