| 摘要 |
<p>PURPOSE:To protect a sensor chip without requiring the special protection such as a mesh cover or the like, by mounting the sensor chip to a flat plate bored at the part of a heat generator. CONSTITUTION:A flow sensor chip 1 is mounted to the flat plate 2 shown by a shaded part. Since the part of a heat generator R is perfectly separated from the flat plate 2, no heat is transmitted to the flat plate 2 from the heat generator R. Further, since the side surface thereof is in a flat state, the flow of a fluid is not obstructed and the protection of the sensor chip 1 can be performed. Leads 3 are also similarly mounted to the flat plate 2 and connected to the pad of the sensor chip 1 by wires 4. By the above-mentioned structure, the original can be stably obtained without requiring a special protective measure such as a mesh cover.</p> |
