发明名称 FORMATION OF GOLD ELECTRODE
摘要 PURPOSE:To enable hydrophobic part of amphipathic molecules to be oriented towards a gold electrode and to be accumulated one on another directly, by forming the gold electrode on a glass substrate by means of vacuum vapor deposition process after the glass substrate is chemically treated with a silane agent such as trimethyl chlorosilane or the like. CONSTITUTION:A glass substrate 1 is subjected to supersonic washing with 'DEKON 90(R)' (decontaminating agent) (diluted to 5% with distilled water) for five minutes. After rinsed well with distilled water, it is heat dried at about 100 deg.C for two or three hours. The glass substrate 1 is then dipped in chloroform solution of 4 % trimethyl chlorosilane for 24 hours so that the surface of the glass substrate is subjected to hydrophobic treatment. The substrate is then rinsed well with chloroform solution. Dried nitrogen gas freed of dust or other contaminant is blown upon the glass substrate 1 to dry the same. Subsequently, gold is resistance heated by means of a vacuum deposition apparatus and a gold electrode pattern is formed by using a vapor deposition mask. Thereby, it is possible to orient hydrophobic portion of amphipathic molecules towards the gold electrode and to accumulate one over another directly.
申请公布号 JPS63236318(A) 申请公布日期 1988.10.03
申请号 JP19870072606 申请日期 1987.03.24
申请人 SHARP CORP 发明人 TOMONO TAKAO;MIYATA AKIO;UNUMA YUTAKA;TOUGAKI YOSHIYUKI
分类号 H01L21/28;H01L21/285;H01L51/05;H01L51/40 主分类号 H01L21/28
代理机构 代理人
主权项
地址