| 摘要 |
PURPOSE:To improve accuracy of alignment, by measuring the amount of position shift in prescribed regions on a substrate by a TTL method and performing alignment of an original plate to the substrate in the respective regions on the substrate on the basis of correction lattice information formed from the results of measurement. CONSTITUTION:The amount of position shift of an original plate RT to a substrate WF in prescribed regions on the substrate WF is measured by observing light which transmits a projection optical system LN and is reflected on or diffracted from marks on the substrate WF (a TTL method), and theta directional alignment of the substrate WF is performed on the basis of the results of measurement. Thereafter, similarly the amount of position shift of the original plate RT to the substrate WF is measured again by the TTL method in the prescribed regions on the substrate WF. Next, correction lattice information is formed on the basis of the results of measurement and stored, and alignment of the original plate RT to the substrate WF in the respective regions on the substrate WF is performed on the basis of the correction lattice information. Hence, alignment of the original plate to the substrate can be performed with good accuracy.
|
